XPS
QMS
RHEED
Ellipsometer
FTIR
Thermal ALD
Plasma Etching
Ion Beam
RADICAL ENHANCED ALD
Chemical Processing
Tranfer Tube
The Chang Lab employs a wide variety of high vacuum chambers and systems utilized in synthesis, processing, and characterization of novel thin films. Additional equipment can be found in the UCLA Nanoelectronics Research Facility.
Instrumentation includes, but is not limited to, x-ray photoelectron spectroscopy (XPS), reflection high-energy electron diffraction (RHEED), and Fourier transform infrared spectroscopy (FTIR).