Publications

119	F.F. Chen, Landau damping of helicon waves, Australian National Univ. Rept. ANU-PRL IR 85/12 (unpublished) (1985).
128	F.F. Chen, Helicon wave plasma sources, Proceedings of the Int'l Conf. on Plasma Physics, Kiev, USSR (World Scientific, Singapore), Vol. 2, p. 1378 (1987).
134	F.F. Chen, Helicon waves at low magnetic fields, UCLA Rept. PPG-1270 (1989).
135	F.F. Chen, Excitation of large amplitude plasma waves, Phys. Scr. T30, 14 (1990).
137	F.F. Chen, Plasma ionization by helicon waves, Plasma Phys. Control. Fusion 33, 339 (1991); UCLA PPG-1317 (1990).
139	F.F. Chen and G. Chevalier, RF production of long, dense plasma columns, Proc. Int'l Conf. on Plasma Physics III, 1701 (Inst. for Ion Physics, Univ. of Innsbruck, A-6020 Innsbruck, Austria) (1992); UCLA PPG-1426.
140	F.F. Chen and G. Chevalier, Experiments on helicon plasma sources, J. Vac. Sci. Technol. A 10, 1389 (1992); "Experiments on new RF plasma sources for etching and deposition", UCLA PPG-1375 (1991).
142	F.F. Chen and C.D. Decker, Electron acceleration in helicon sources, Plasma Phys. Control. Fusion 34, 635 (1992); "Helicon wave plasma sources", UCLA PPG-1272 (1989).
144	F.F. Chen, Capacitor tuning circuits for inductive loads, UCLA Rept. PPG-1401 (unpublished) (1992).
145	F.F. Chen, Electron runaway in RF discharges, Plasma Science Center, Nagoya Univ., Rept. PSC-25 (1992).
146	F.F. Chen and G. Chevalier, RF production of long, dense plasma columns, UCLA PPG-1426 (1992).
148	G. Chevalier and F.F. Chen, Experimental modeling of inductive discharges, J. Vac. Sci. Technol. A 11, 1165 (1993); UCLA PPG-1464 (1992).
150	F.F. Chen and G. Chevalier, Diagnostics of rf plasmas for semiconductor etching, Calif. Microelec. Innov. and Computer Research Opportunities (MICRO) Project Reports, 1991-92, p. 348 (1993).
151	F.F. Chen, M.J. Hsieh, and M. Light, Helicon waves in a nonuniform plasma, Plasma Sources Sci. Technol. 3, 49 (1994); UCLA PPG-1485 (1993).
152	I.D. Sudit and F.F. Chen, RF compensated probes for high-density discharges, Plasma Sources Sci. Technol. 3, 162 (1994); UCLA PPG-1491(1993).
153	I.D. Sudit and F.F. Chen, A nonsingular helicon wave equation for a nonuniform plasma, Plasma Sources Sci. Technol. 3, 602 (1994).
154	F.F. Chen, Industrial Applications of Low-Temperature Plasma Physics, Part B: Vugraphs, UCLA PPG-1528 (1994).
155	F.F. Chen, Helicon Plasma Sources, in "High Density Plasma Sources", ed. by Oleg A. Popov (Noyes Publications, Park Ridge, NJ), Chap. 1 (1995); UCLA PPG-1506 (1994).
156	F.F. Chen, The 'Sources' of Plasma Physics, IEEE Trans. Plasma Sci. 23, 20-47 (1995); UCLA PPG-1521 (1994).
157	M. Light and F.F. Chen, Helicon Wave Excitation with Helical Antennas, Phys. Plasmas 2, 1084 (1995); UCLA PPG-1520 (1994).
158	M. Light, I.D. Sudit, F.F. Chen, and D. Arnush, Axial Propagation of Helicon Waves, Phys. Plasmas 2, 4094 (1995); UCLA PPG-1541.
159	F.F. Chen, Industrial Applications of Low-Temperature Plasma Physics, Phys. Plasmas 2, 2164 (1995); UCLA PPG-1527 (1994).
161	F.F. Chen, ed., Plasma Processing and Processing Science, Naval Studies Board Panel Report (National Academy Press, 1995).
163	I.D. Sudit and F.F. Chen, Discharge equilibrium of a helicon plasma, Plasma Sources Sci. Technol. 5, 43 (1996); "Remote Source Characteristics of Helicon Discharges", UCLA PPG-1534 (1995).
164	D. Arnush and A. Peskoff, Helicon Waves in a Flaring Magnetic Field, Plasma Phys. Control. Fusion 38, 129 (1996).
165	F.F. Chen, DC Probe Detection of Phased EEDFs in RF Discharges, Plasma Phys. Control. Fusion 39, 1533 (1997); "Probe Detection of Phased EEDFs in RF Discharges ", UCLA PPG-1542 (1995).
166	F.F. Chen, I.D. Sudit, M.E. Light, D.D. Blackwell, D.W. Aossey, D. Arnush, and A. Peskoff, Progress on helicon wave sources, Proc. 1994 Int't Conf. on Plasma Physics, Foz do Iguaçu, Brazil, Vol. 3, 21 (1994).
167	F.F. Chen, I.D. Sudit, M. Light, D.D. Blackwell, and D. Arnush, Equilibrium conditions in high-density helicon discharges, Proc. Plasma Etch Users Group (NCCAVS, 150 W. Iowa Ave., Suite 104, Sunnyvale, CA 94086), p. 95 (1995).
168	D. Arnush and A. Peskoff, Helicon Waves in a Flaring Magnetic Field, Part I: Equations in Spherical Coordinates and WKB-like Solutions, UCLA PPG-1538 (1995).
169	A. Peskoff and D. Arnush, Helicon Waves in a Flaring Magnetic Field, Part II: Solution in a Conical Region, UCLA PPG-1539 (1995).
170	F.F. Chen, Physics of helicon discharges, Phys. Plasmas 3, 1783 (1996); UCLA PPG-1553.
171	F.F. Chen, I.D. Sudit, and M. Light, Downstream physics of the helicon discharge, Plasma Sources Sci. Technol. 5, 173 (1996); UCLA PPG-1543 (1995).
172	F.F. Chen, Plasma-induced oxide damage: a status report, UCLA PPG-1566 (1996).
173	R.W. Boswell and F.F. Chen, Helicons, the early years, IEEE Trans. Plasma Sci. 25, 1229 (1997).
174	F.F. Chen and R.W. Boswell, Helicons, the past decade, IEEE Trans. Plasma Sci. 25, 1245 (1997); UCLA PPG-1567 (Oct. 1996).
175	F.F. Chen and D. Arnush, Generalized theory of helicon waves I: Normal modes, Phys. Plasmas 4, 3411 (1997); UCLA PPG-1562 (Aug 1996).
176	F.F. Chen, X. Jiang, J.D. Evans, G. Tynan, and D. Arnush, Low Field Helicon Discharges, Plasma Phys. Control. Fusion 39, A411 (1997); UCLA PPG-1564 (Sept. 1996).
177	D.D. Blackwell and F.F. Chen, 2D imaging of a helicon discharge, Plasma Sources Sci. Technol. 6, 569 (1997); UCLA PPG-1571 (Mar. 1997).
178	F.F. Chen, Plane-polarized helicon waves, Plasma Sources Sci. Technol. 6, 394 (1997); UCLA PPG-1570 (Feb. 1997).
179	D. Arnush and F.F. Chen, Generalized theory of helicon waves II: Excitation and absorption, Phys. Plasmas 5, 1239 (1998); UCLA PPG-1573 (June 1997).
180	F.F. Chen, Nonlinear diffusion in magnetized discharges, Plasma Sources Sci. Technol. 7, 458 (1998); UCLA PPG-1579 (Jan. 1998).
181	D.G. Miljak and F.F. Chen, Helicon wave excitation with rotating antenna fields, Plasma Sources Sci. Technol. 7, 61 (1998); "Excitation of helicon waves with rotating antenna fields", UCLA PPG-1575 (August 1997).
182	D.G. Miljak and F.F. Chen, Density limit in helicon discharges, Plasma Sources Sci. Technol. 7, 537 (1998); UCLA PPG-1582 (Jan 1998).
183	F.F. Chen and J.D. Evans, Performance of a multi-tube, large-area helicon source, Proc. Plasma Etch Users Group (NCCAVS, 150 W. Iowa Ave., Suite 104, Sunnyvale, CA 94086 (1998); UCLA LTP-805 (May 1998).
184	F.F. Chen, D. Arnush, D.D. Blackwell, and J.D. Evans, Coupled helicon-TG modes: theory and experiment, Proc. 1998 Int'l Congress on Plasma Physics, Prague, Czech Republic, on CD-ROM (Europhysics Conf. Abstracts 22C, 2655) (1998); UCLA LTP-806 (June 1998).
185	F.F. Chen and D.D. Blackwell, Upper limit to Landau damping in helicon discharges, Phys. Rev. Lett. 82, 2677 (1999); UCLA LTP-809 (Sept. 1998).
186	M. Light, I.D. Sudit, and F.F. Chen, Role of helicon waves in helicon sources, (1996)Poster paper, SRC Techcon'96, Phoenix, AZ (Sept. 1996).
187	D.D. Blackwell and F.F. Chen, Measurement of EEDFs in an RF plasma, (1996)Poster paper, SRC Techcon'96, Phoenix, AZ (Sept. 1996).
188	D.D. Blackwell and F.F. Chen, Time-resolved measurements of the EEDF in a helicon plasma, Plasma Sources Sci. Technol. 10, 226 (2001); UCLA LTP-905 (May, 1999).
189	F.F. Chen, X. Jiang, and J.D. Evans, Plasma injection with helicon sources, J. Vac. Sci. Technol. A 8, 2108 (2000); UCLA LTP-907 (July, 1999).
190	F.F. Chen, Langmuir probe analysis for high-density plasmas, Phys. Plasmas 8, 3029 (2001); UCLA LTP-006 (June 2000).
191	F.F. Chen and D. Arnush, Characterization and modeling of the MØRI source, (2000); UCLA LTP-002 (Feb. 2000).
192	D. Arnush, Role of Trivelpiece-Gould Waves in Antenna Helicon Wave Coupling, Phys. Plasmas 7, 3042 (2000); UCLA LTP-003 (March, 2000).
193	F.F. Chen, J.D. Evans, and G.R. Tynan, Design and performance of distributed helicon sources, Plasma Sources Sci. Technol. 10, 236 (2001); UCLA LTP-008 (August, 2000).
194	F.F. Chen and J.D. Evans, Use of Langmuir probes in high density plasmas, Proc. ICPP-2000, Quebec, Canada (October 2000), Vol. 3, p. 908; UCLA LTP-009 (September, 2000).
195	J.D. Evans, F.F. Chen, and D. Arnush, Investigation of Electromagnetic Field Penetration in ICP and Weakly-Magnetized ICP Discharges, Proc. ICPP-2000, Quebec, Canada (October 2000), Vol. 3, p. 916; UCLA LTP-010 (October, 2000).
196	F.F. Chen, Collisional, magnetic, and nonlinear skin effect in RF plasmas, Phys. Plasmas 8, 3008 (2001); UCLA LTP-011 (November, 2000).
197	M. Light, F.F. Chen, and P.L. Colestock, Instability driven radial transport in a helicon plasma, UCLA LTP-101 (January, 2001), rejected by Phy. Rev. Lett.
198	J.D. Evans and F.F. Chen, Nonlocal power deposition in inductively coupled plasmas, Phys. Rev. Lett. 86, 5502 (2001); UCLA LTP-102 (February, 2001).
199	M. Light, F.F. Chen, and P.L. Colestock, Low frequency electrostatic instability in a helicon plasma, Phys. Plasmas 8, 4675 (2001); UCLA LTP-103 (March, 2001).
200	F.F. Chen, Physical mechanisms in industrial rf plasma sources, Proc. 14th Topical Conf. on RF Power in Plasmas, Oxnard, CA (2001); UCLA LTP-104 (April, 2001).
201	F.F. Chen and D. Arnush, The floating potential of cylindrical Langmuir probes, Phys. Plasmas 8, 5051 (2001); UCLA LTP-105 (May, 2001).
202	D.D. Blackwell, T.G. Madziwa, D. Arnush, and F.F. Chen, Evidence for Trivelpiece-Gould modes in a helicon discharge, Phys. Rev. Lett. 88, 145002 (2002); LTP-106 (June, 2001).
203	M. Light, F.F. Chen, and P.L. Colestock, Quiescent and unstable regimes of a helicon plasma, Plasma Sources Sci. Technol. 11, 273 (2002);UCLA LTP-107 (August, 2001).
204	F. F. Chen, J. D. Evans, and D. Arnush, A floating potential method for measuring ion density, Phys. Plasmas 9, 1449 (2002); UCLA LTP-108 (August, 2001).
205	L. Porte, S.M. Yun, F.F. Chen, and D. Arnush, Superiority of half-wavelength helicon antennas, Plasma Sources Sci. Technol. 12, 287 (2003); LTP-110 (Oct. 2001).
206	J.D. Evans, W. Zawalsky, and F.F. Chen, Evaluation of Langmuir probe ion density measurement theories using microwave interferometry and plasma oscillation probe methods in an inductively coupled plasma, Plasma Sources Sci. Technol. (submitted, 2002); UCLA LTP-111 (November, 2001).
207	F.F. Chen, Design of a helicon plasma injector using the HELIC code, UCLA LTP-202 (February, 2002).
208	F.F. Chen and J.P. Chang, Lecture Notes on Principles of Plasma Processing (Kluwer/Plenum, 2002).
209	F.F. Chen, The low-field density peak in helicon discharges, Phys. Plasmas 10, 2586 (2003); UCLA LTP-211 (November, 2002).
210	F.F. Chen, Lecture Notes on Langmuir Probe Diagnostics, Mini-course on Plasma Diagnostics, IEEE-ICOPS meeting, Jeju, Korea, June 2003.
211	T.G. Madziwa, D. Arnush, and F.F. Chen, Ion orbits in electron-shading damage, UCLA LTP-302 (February, 2003).
212	F.F. Chen, A Novel Helicon Plasma Source for Large-Area Displays, Proceedings of 2005 NSF DMII Grantees Conference, Scottsdale, Arizona; UCLA LTP-409 (Sept. 2004).
213	F.F. Chen, RF Plasma Sources for Semiconductor Processing, in Advanced Plasma Technology, ed. by F. Arefi-Khonsari, R. d’Agostino, P. Favia, H. Ikegami, Y. Kawai, and N. Sato (Wiley-VCH, Berlin, 2006), (2nd Int'l School of Advanced Plasma Technology, Varenna, Italy, Sept. 2004); UCLA LTP-505 (May 2005).
214	F.F. Chen, Nonlinear effects and anomalous transport in rf plasmas, IEEE Trans. Plasma Sci. (2005), (Workshop on Nonlocal, Collisionless Electron Transport in Plasmas, Princeton, August 2005); UCLA LTP-506 (June, 2005).
215	F.F. Chen, The dynamic impedance of an rf sheath, UCLA LTP-509 (Sept. 2005).
216	F.F. Chen, Physical mechanism of current-free double layers, Phys Plasmas 13, 034502 (2006); UCLA LTP-511 (Nov. 2005).
217	F.F. Chen and H. Torreblanca, Design of a permanent magnet helicon reactor, UCLA LTP-601 (Jan. 2006).
218	F.F. Chen and H. Torreblanca, Large area helicon plasma source with permanent magnets, Plasma Phys. Control. Fusion 48, A81 (2007); UCLA LTP-605 (May 2006).
219	T.G. Madziwa-Nussinov, D. Arnush, and F.F. Chen, Ion orbits in plasma etching of semiconductors, Phys. Plasmas 15, 013503 (2007), UCLA LTP-611 (Nov. 2006).
220	F.F. Chen, Density jump in helicon discharges; Plasma Sources Sci. Technol. 16, 593 (2007); UCLA LTP-702 (February 2007).
221	T.G. Madziwa, D. Arnush, and F.F. Chen, Ion shading effects during metal etch in plasma processing, IEEE Trans. Plasma Sci. 35, 1388 (2007); UCLA LTP-701 (January 2007).
222	F.F. Chen, Comment on "Comment on 'Magnetic field effects on gas discharge plasmas' [Phys. Plasmas 13, 063511 (2006)]", Phys. Plasmas 14, 094703 (2007); UCLA LTP-706 (June 2007).
223	F.F. Chen, Diffusion of an annular plasma in positron acceleration, Phys. Plasmas 14, 122108 (2007); UCLA LTP-707 (July 2007).
224	F.F. Chen, Permanent magnet helicon source for ion propulsion, IEEE Trans. Plasma Sci 36, 2095 (2008); UCLA LTP-709 (Sept. 2007).
225	F.F. Chen, Langmuir probes in RF plasma: surprising validity of OML theory, Plasma Sources Sci. Technol. 18, 035012; UCLA LTP-809 (Sept. 2008).
226	F.F. Chen and H. Torreblanca, Permanent magnet helicon sources and arrays: a new type of rf plasma. Phys. Plasmas 16, 057102; UCLA LTP-811 (Nov. 2008).
227	D. Curreli and F.F. Chen, Equilibrium theory of cylindrical discharges with special application to helicons, Phys. Plasmas 18, 113501 (2011); UCLA LTP-1107 (July, 2011).
228	F.F. Chen and H. Torreblanca, Permanent magnet helicon discharge array, IEEE Trans. Plasma Sci. 39, 2452 (2011); UCLA LTP-1012 (Dec. 2010).
229	F.F. Chen, An Indispensable Truth, How Fusion Power Can Save the Planet, Springer, April 2011.
230	F. F. Chen and D. Curreli, Equilibrium theory for plasma discharges of finite length, UCLA LTP-1106 (Nov. 2011). This was unreasonably rejected by Phys. Rev. Letters.
231	F.F. Chen, J.D. Evans, and W. Zawalski, Calibration of Langmuir probes against microwaves and plasma oscillation probes, Plasma Sources Sci. Technol. 21, 055002 (2012); UCLA LTP-1202 (Feb. 2012).
232	F.F. Chen, Langmuir probe measurements in the intense RF field of a helicon discharge, Plasma Sources Sci. Technol. 21, 055013; UCLA LTP-1205 (May, 2012).
233	F.F. Chen, Performance of a permanent magnet helicon source at 27 and 13 MHz, Phys. Plasmas 19, 093509 (2012); UCLA LTP-1207 (July, 2012).
234	F.F. Chen and D. Curreli, Central peaking of magnetized gas discharges, Phys. Plasmas 20, 057102 (2013); UCLA LTP-1210 (October, 2012).
235	F.F. Chen, Antenna mechanisms and electrostatic fields in helicon discharges, rejected by Plasma Sources Sci. Technol.(2013); UCLA LTP-1212 (December, 2012).