Research by UC faculty is aimed at developing new technologies for manufacturing VLSIs at or below 0.1 micron. The research is divided among three areas: devices, materials, and equipment & processing. Below are links to web sites of participating faculty.

Materials
King-Ning Tu Low-k Dielectrics	Subhash Risbud Materials Synthesis
Co-investigator Professor Department of Materials Science University of California Los Angeles, CA  90095	Co-investigator Professor Department of Materials Science University of California Davis, California, 95616-5294

Equipment and Processes
Eray Aydil Plasma Processing	Jane Chang Plasma Processing
Co-investigator Professor Department of Chemical Engineering University of California Santa Barbara, California, 93106	Co-investigator Assistant Professor Department of Chemical Engineering 5532-D Boelter Hall University of California Los Angeles, CA 90095
John Crowell Surface Chemistry	Robert Hicks PECVD and Etching
Co-investigator Professor Department of Chemistry and Biochemistry University of California, San Diego La Jolla, California, 92093-0314	Principal Investigator Professor Department of Chemical Engineering University of California Los Angeles, California, 90095
Vasilios Manousiouthakis Modeling and Control
Co-investigator Professor Department of Chemical Engineering University of California Los Angeles, California, 90095

Devices
Frank Chang Novel Devices Co-investigator Professor Department of Electrical Engineering University of California Los Angeles, California, 90095