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Table of Contents

1. Mission
2. The Program
   1. Research/Faculty
   2. Education/Training
   3. Teaching Labs

Research

Silicon Integrated Circuits

Research by UC faculty is aimed at developing new technologies for manufacturing VLSICs at or below 0.1 micron. The research is divided among three areas: devices, materials, and equipment & processing. Below are links to web sites of participating faculty.

Materials
King-Ning Tu	UCLA Materials Science Low-k Dielectrics	Subhash Risbud	UCD Chem. Eng. & Mat. Sci. Materials Synthesis




Equipment and Processes
Eray Aydil	UCSB Chemical Engineering Plasma Processing	Jane Chang	UCLA Chemical Engineering Plasma Processing
John Crowell	UCSD Chemistry Surface Chemistry	Robert Hicks	UCLA Chemical Engineering PECVD and Etching
Vasilios Manousiouthakis	UCLA Chemical Engineering Modeling and Control




Devices
Frank Chang	UCLA Electrical Engineering Novel Devices

Compound Semiconductors
Under construction!